Reduces the process time by 50%
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Improving a-C mask selectivity 3-4 times compared with C4F6
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A thousand time smaller (1/1000) GWP compared with conventional fluorocarbons (a-C4F8)
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enScribe G1 gas reduces client's fab CO2 emission by 4% - equivalent to the reduction of CO2 emission from 29,000 cars
The Financial Benefits
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Less than 5 years payback time
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Improve yield by 10 % compared to mainstream alternative